PE-50 Compact Benchtop Plasma Cleaning System

 

 
 

The PE-50 is a feature packed, low cost, entry level option for plasma treatment. It's a robust machine that is perfect for small production facilities, research labs, universities, or any industry which needs a small-scale, cost-effective plasma treatment solution.

This unit can use up to two gases simultaneously and excels at research level plasma cleaning and surface modification.

If you are looking for a fully automated solution, our PE-50 Venus plasma cleaning system combines the high value of the PE-50 with fully automated processing. The Venus system includes the same laptop control found on our larger systems.

 
 
Specification

Electrode Configuration One or Two Horizontal (5"Wx6"D)
Generator 200W 20-80KHz Auto Frequency Tuning With Adjustable Pulsing Rate
Gas Control Two 0-25cc/min Rotometers with Precision Needle Valves
Vacuum Gauge 1-2000 mT
Vacuum Pump 5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
Control System PLC-Based Keypad Input System with Alphanumeric Display; Stores One Recipe for Automatic Process Sequencing
Chamber Material 6061-T6 Aluminum
Chamber Dimensions 5.5”Wx7”Dx3.5”H
Electrical Requirement 120VAC / 60Hz @ 15A or 220VAC / 50Hz @ 14A
Unit Dimensions 14"x14.5"x18"
Unit Weight 55lbs
Vacuum Pump Weight 35lbs
 
 
Optional Features

All compact benchtop systems can be thoroughly customized with a wide range of features including:

MHz Power Supplies with Automatic Matching Network
Higher watt/frequency power supplies

PC-based Control System
For fully automatic plasma treater control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.

Dry Vacuum Pump
For more control over the process chamber pressure

Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator
To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity

Additional Gas Inputs/Rotometers
Allows for more complex process gas combinations

Digital Mass Flow Controllers
Provides digital automation and monitoring of process gases

Light Tower
For easy visualization of the steps of the plasma processing sequence

 
 
Download

PE-50 Datasheet

Download