All compact benchtop systems can be thoroughly customized with a wide range of features including:
MHz Power Supplies with Automatic Matching Network
Higher watt/frequency power supplies
PC-based Control System
For fully automatic plasma treater control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.
Dry Vacuum Pump
For more control over the process chamber pressure
Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator
To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
Additional Gas Inputs/Rotometers
Allows for more complex process gas combinations
Digital Mass Flow Controllers
Provides digital automation and monitoring of process gases
Light Tower
For easy visualization of the steps of the plasma processing sequence |