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Zepto One |
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Vacuum Chamber
Borosilicate glass round, with lid
Ø:105mm D:200mm Volume approx. 1.7L
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Gas supply
1 x needle valve |
Generator
100 kHz | Power output 0 - 30 W
13,56 MHz | Power output 0 - 30 W |
Electrode
Electrode pair outside the vacuum chamber |
Control unit
Semi-automatic control unit |
Power supply
230 V | 50 - 60 Hz |
Pressure measurement
- |
Pump
Suction capacity min. 3 m³/h |
Dimensions
W: 269 mm H: 176 mm D: 324 mm |
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Zepto |
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Vacuum chamber
Borosilicate glass round, Hinged door
Ø:105mm D:300mm Volume approx. 2.6L
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Gas supply
2 x needle valve |
Generator
40 kHz | Power output 0 - 100 W
13,56 MHz | Power output 0 - 200 W |
Electrode
Electrode pair outside the vacuum chamber |
Control unit
Semi-automatic control unit |
Power supply
230 V | 50 - 60 Hz |
Pressure measurement
Pirani |
Pump
Suction capacity min. 3 m³/h |
Dimensions
W: 425 mm H: 185 mm D: 450 mm |
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Zepto |
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Vacuum chamber
Borosilicate glass round, Hinged door
Ø:105mm D:300mm Volume approx. 2.6L
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Gas supply
1 x MFC |
Generator
40 kHz | Power output 0 - 100 W
13,56 MHz | Power output 0 - 200 W |
Electrode
Electrode pair outside the vacuum chamber |
Control unit7" Basic PC control unit (Windows Embedded Compact 7) |
Power supply
230 V | 50 - 60 Hz |
Pressure measurement
Pirani |
Pump
Suction capacity min. 3 m³/h |
Dimensions
W: 425 mm H: 185 mm D: 450 mm |
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Zepto RIE |
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Vacuum chamber
Aluminium round, with lid
Ø: 190 mm H: 60 mm Volume approx. 1L
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Gas supply
2 x needle valve |
Generator
13,56 MHz | Power output 0 - 200 W
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Electrode
Electrode inside the vacuum chamber - Ø: 160 mm for max. 6" wafer |
Control unit
Semi-automatic control unit |
Power supply
230 V | 50 - 60 Hz |
Pressure measurement
Pirani |
Pump
Suction capacity min. 3 m³/h |
Dimensions
W: 425 mm H: 310 mm D: 450 mm |
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