Diener Atto |
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| The 10.5 litre LOW-COST PLASMA LAB SYSTEM ATTO with manual and Basic PC control is primarily intended for the following applications: small-series manufacture, analytics (SEM, TEM), medical engineering, sterilising, research and development departments, archaeology, textile technology, plastics technology |
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| Specification |
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Atto |
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Vacuum Chamber
Borosilicate glass round, Hinged door
Ø: 211 mm D: 300 mm Volume approx. 10.5 L
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Gas supply
2 x needle valve |
Generator
40 kHz | Power output 0 - 200 W
13,56 MHz | Power output 0 - 300 W |
Electrode
Electrode pair outside the vacuum chamber |
Control unit
Semi-automatic control unit |
Power supply
230 V | 50 - 60 Hz |
Pressure measurement
Pirani |
Pump
Suction capacity min. 6 m³/h |
Dimensions
W: 525 mm H: 257 mm D: 420 mm |
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Atto PC |
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Vacuum chamber
Borosilicate glass round, Hinged door
Ø: 211 mm D: 300 mm Volume approx. 10.5 L
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Gas supply
2 x MFC |
Generator
40 kHz | Power output 0 - 200 W
13,56 MHz | Power output 0 - 300 W |
Electrode
Electrode pair outside the vacuum chamber |
Control unit
7" Basic PC control unit (Windows Embedded Compact 7) |
Power supply
230 V | 50 - 60 Hz |
Pressure measurement
Pirani |
Pump
Suction capacity min. 6 m³/h |
Dimensions
W: 525 mm H: 257 mm D: 420 mm |
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